Introduction to Microfabrication

This will be the primary text for the course. It is available as an e-book through the TU Graz library. TU Graz students can download the pdf files of the chapters of this book using an IP address of the TU.

MKS Handbook of Semiconductor Devices and Process Technology (pdf)

This handbook discusses many of the topics in this course.

International Technology Roadmap for Semiconductors

The field of microelectronics evolves rapidly and books quickly become obsolete. One place to look for up-to-date information is The International Technology Roadmap for Semiconductors. The ITRS Roadmap reviews the latest developments and how microelectronics will develop in the near future.

Principles of Electronic Devices

This book describes the basics of semiconductor device physics. It is an online e-book.

Physik der Halbleiterbauelemente

This book describes the basics of semiconductor device physics. It is available as an e-book from the TU Graz library.

Electronic Materials

Online course notes on electronic materials from Prof. Dr. Helmut Föll of the Faculty of Engineering, University of Kiel.

BYU Cleanroom

A website about the Brigham Young University cleanroom with useful notes about cleanroom procedures.

Reinraumtechnik

Describes clean-room technologies. Available as an e-book from the TU-Graz library.