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Lectures Summer Semester 2017
- Introduction - March 9, 2017: Slides
- Semiconducting materials and devices - March 16, 2017: Slides
- Lithography - March 23, 2017: Slides
- Thin film deposition - March 30, 2017: Slides
- Etching, Cleaning - April 6, 2017: Slides
- Doping, Oxidation - April 27, 2017: Slides
- CMOS, memories - May 4, 2017: Slides
- Micromechanics - May 11, 2017: Slides
- Micromechanics - May 18, 2017: Slides
- Micromechanics - June 22, 2017: Slides
Videos of the lectures are available at:
Summer Semester 2015
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