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Microfabrication is a collection of production methods that are used to create very many electrical or mechanical components simultaneously. These methods have allowed us to produce microcontrollers and computers that affect virtually all aspects of our lives. Microcontrollers are found in household appliances such as coffee makers, vacuum cleaners, dishwashers, heating systems, and televisions. Mobile telephones and the internet have transformed how we communicate. Computers are essential for transportation systems, weather prediction, science, medicine, education, industrial design, banking, and retail sales. Even though computers are so important to modern life, there are relatively few people who understand how they are made.This course describes microelectronic and micromechanical devices and how they are fabricated. We will concentrate on silicon devices produced by optical lithography.
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